Comparison - Linear Coating vs. Spin Coating
Spin Coating |
 |
||
| Efficiency | Wafers per liter | 100 |
555 |
| Waste per liter | 86 cl |
22 cl |
|
| Consumption | Required per 100 wafers | 1 l |
.18 l |
| Wasted per 100 wafers | .86 l |
.04 l |
Comparison at 300mm
